美***SONIX 晶圓檢測(cè)設(shè)備 AutoWafe Pro.
SONIX AutoWafer Pro™ 是專(zhuān)為全自動(dòng)晶圓檢測(cè)設(shè)計(jì)的機(jī)型,主要應(yīng)用在Bond wafer,MEMS 內(nèi)部空洞、離層檢測(cè),TSV量測(cè)方面。
● 使用于200和300mm晶圓
● 符合******凈化間標(biāo)準(zhǔn)
● Cassette裝載,全自動(dòng)檢測(cè),支持FOUP或FOSB機(jī)械臂
● 支持200mm & 300mm SECS/GEM協(xié)議
● KLARF輸出文件
AutoWafe Pro, SONIX wafer detection device.
SONIX AutoWafer Pro™ is designed for fully automatic wafer detection, mainly for Bond wafer, MEMS internal cavity detection, separation detection, and TSV measurement.
● for 200 mm and 300mm wafers
● comply with the standard of first class purification room
Cassette loaded, fully automatic detection, support for FOUP or FOSB manipulator
● support 200mm & 300mm SECS/GEM protocol
● KLARF output file