瑞典Obducat 30Kv TFE， 50Kv TFE電子束刻蝕系統(tǒng)

1998年Obducat公司并購了在SEM有三十年經(jīng)驗的Camscan，并結(jié)合自身在納米壓印設(shè)備以及光存儲設(shè)備的開發(fā)經(jīng)驗，研發(fā)了電子束刻蝕設(shè)備，提供EBR-30kV,EBR-50kV兩種不同型號，都配備熱場發(fā)射電子腔。 技術(shù)參數(shù)Electron gun /
Filament type
Thermal Field Emission (ZrO/C) X/Y Tilt/Shift Magnetic Alignment

Cathode life
Typically 10,000 hrs+

Beam spot size
Down to 8 nm 30 kV, Down to 2nm 50kV

Beam current density
Typically > 1000 A/cm2

Acceleration voltage
30 kV or 50kV

Gun EHT unit
EHT unit includes Suppressor, Extractor, Lens and Filament supplies

Condenser lenses
Integrated E/S Lens in Electron Gun, and Magnetic Condenser Lens

Objective lens
One electromagnetic low aberration final probe forming lens

Stigmator T
wo Octupole Stigmators, to correct both lens and source astigmatism

Beam blanker
Electrostatic blanking plates conjugate to writing plane Bandwidth up to 30 MHz. (tr/tf < 6 ns)

Dynamic focus
Iron free coil, ±100 μm range

Beam current drift
< ±0.5% / hr with activated beam current feedback system

Beam apertures
4 selectable by aperture changer mechanism

Maximal travel 100 mm
Drive unit Brush less 3-phase linear motor
Bearing Cross roller bearing
Straightness < 5 μm / 50 mm
Measuring system Integrated laser scale, resolution < 1nm
Position repeatability < ± 6.4 nm
Dynamic position error < ± 3.8 nm
Speed range high resolution 2.5 - 250 μm/s
Speed range low resolution Up to 5 mm/s

Rotation Spindle
Axial rotational error < 0.05 μm
Radial rotational error < 0.05 μm
Radial async. rotation error < 0.015 μm ptp
Rotation speed 1-3000 rpm

主要特點(diǎn)General:
Feedback and closed-loop systems guarantees long time exposure stability.
Fast exposure, High beam current from 1 nA to 30 nA,
CLV or CAV exposure method,
Overlay exposure accuracy and DOSE-control,

Mechanics：
Linear motor and stage outside of vacuum chamber
No magnetic/electrostatic or acoustics interference
Brush less sub systems ensure repeatability
Rotation stage on air bearing
Radial async. rotation error less than 15 nm ptp
 

瑞典Obducat 30Kv TFE， 50Kv TFE電子束刻蝕系統(tǒng)

瑞典Obducat 30Kv TFE， 50Kv TFE電子束刻蝕系統(tǒng)